説明
MISSING PARTS: Penning gauge indicator (ForLine) Edge He CONT (BackHe Edge) Ceramic arm (handling) Insulated pipe (P/C)構成
Process ML Etch Back Wafer Shape Notch Wafer Cassette 8" Plastic Miraial SMIF Interface NO Equipment composition 1.Main Body 2.Machine controller 3.RF Rack 4.PC temperature controller 5.Exhaust set 1.Process chamber 1-1.Upper electrode Upper Electrode body Baffle plate Upper cooling plate Crystal electrode Shield ring(Quartz) Clamp ring(Ceramic) Temperature control range(20~60℃） 1-2.Lower electrode Electrostatic chuck Exhaust ring Insulator guard Insulator guard ring Temperature control range(-30~25℃） "Upper and lower electrode spacing setting range : 9～20ｍｍ±0.1㎜" 1-3.Sidewall Deposhield Temperature control range(室温～60℃） 1-4.Exhaust Throttle valve : CMLA-11 10Torr (Tyran General) APC : AC-2 (Tyran General) Capacitance manometer : CMLA-11 10Torr (Tyran General) 1-5.RF System Upper and lower electrode application method RF Gen DAIHEN NFG-20SA3 380KHz 2000W Matcher DAIHEN NFM-20SA2 380KHz 2000W Power splitter DAIHEN NFT-20SB 380KHz 2000W 1-6.Gas species(MFC Type) AERA FC-770AC GAS 1 CHF3 : 100sccm GAS 2 CF4 : 200sccm GAS 3 Ar : 1000sccm GAS 4 N2 : 50sccm GAS 5 O2 : 100sccm B.P.C He : 30sccm B.P.E He : 30sccm 1-7.EPD Monochromator(JOBIN YVON H-10V) Emission spectroscopy method Wavelength variable range : 200~800nm 2.L/L 2-1.Transport Robot transfer by 2-way operation Arm holder : Conductive Teflon coating Wafer sensor : OMRON E3Y-R2C43S) 3.Transport system 3-1.Indexer Carrier sensor : Transparent Uni-cassette method Wafer sensor output : ＞44.7μW (Safety measure) 3-2.H/A Tweezers : ceramic (Conductive Teflon coating) Transport : Robot transfer by 3-way operation 3-3.P/A Tweezers : Aluminum A5052(Conductive Teflon coating) Chuck : Aluminum A5056(Conductive Teflon coating) Aligner : Non-contact orientation flat detection 3-4.E/S Chuck : Aluminum A5056(Conductive Teflon coating) 4.Temperature controller Chiller SMC INR-341-54E Upper electrode :20~60℃ , Lower electrode : -30~10℃ 5.pump Unit TMP STP-H751E(SEIKO SEIKI) 6.AC POWER BOX 6-1.Voltage drop transformer Isolation transformer 6-2.Transformer heating interlockOEMモデルの説明
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TEL / TOKYO ELECTRON
TE 8500
検証済み
カテゴリ
Plasma Etch
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
33003
ウェーハサイズ：
8"/200mm
ヴィンテージ：
1995
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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すべて表示
TEL / TOKYO ELECTRON
TE 8500
検証済み
カテゴリ
Plasma Etch
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
33003
ウェーハサイズ：
8"/200mm
ヴィンテージ：
1995
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
MISSING PARTS: Penning gauge indicator (ForLine) Edge He CONT (BackHe Edge) Ceramic arm (handling) Insulated pipe (P/C)構成
Process ML Etch Back Wafer Shape Notch Wafer Cassette 8" Plastic Miraial SMIF Interface NO Equipment composition 1.Main Body 2.Machine controller 3.RF Rack 4.PC temperature controller 5.Exhaust set 1.Process chamber 1-1.Upper electrode Upper Electrode body Baffle plate Upper cooling plate Crystal electrode Shield ring(Quartz) Clamp ring(Ceramic) Temperature control range(20~60℃） 1-2.Lower electrode Electrostatic chuck Exhaust ring Insulator guard Insulator guard ring Temperature control range(-30~25℃） "Upper and lower electrode spacing setting range : 9～20ｍｍ±0.1㎜" 1-3.Sidewall Deposhield Temperature control range(室温～60℃） 1-4.Exhaust Throttle valve : CMLA-11 10Torr (Tyran General) APC : AC-2 (Tyran General) Capacitance manometer : CMLA-11 10Torr (Tyran General) 1-5.RF System Upper and lower electrode application method RF Gen DAIHEN NFG-20SA3 380KHz 2000W Matcher DAIHEN NFM-20SA2 380KHz 2000W Power splitter DAIHEN NFT-20SB 380KHz 2000W 1-6.Gas species(MFC Type) AERA FC-770AC GAS 1 CHF3 : 100sccm GAS 2 CF4 : 200sccm GAS 3 Ar : 1000sccm GAS 4 N2 : 50sccm GAS 5 O2 : 100sccm B.P.C He : 30sccm B.P.E He : 30sccm 1-7.EPD Monochromator(JOBIN YVON H-10V) Emission spectroscopy method Wavelength variable range : 200~800nm 2.L/L 2-1.Transport Robot transfer by 2-way operation Arm holder : Conductive Teflon coating Wafer sensor : OMRON E3Y-R2C43S) 3.Transport system 3-1.Indexer Carrier sensor : Transparent Uni-cassette method Wafer sensor output : ＞44.7μW (Safety measure) 3-2.H/A Tweezers : ceramic (Conductive Teflon coating) Transport : Robot transfer by 3-way operation 3-3.P/A Tweezers : Aluminum A5052(Conductive Teflon coating) Chuck : Aluminum A5056(Conductive Teflon coating) Aligner : Non-contact orientation flat detection 3-4.E/S Chuck : Aluminum A5056(Conductive Teflon coating) 4.Temperature controller Chiller SMC INR-341-54E Upper electrode :20~60℃ , Lower electrode : -30~10℃ 5.pump Unit TMP STP-H751E(SEIKO SEIKI) 6.AC POWER BOX 6-1.Voltage drop transformer Isolation transformer 6-2.Transformer heating interlockOEMモデルの説明
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ドキュメントなし