説明
説明なし構成
TEL Unity M SCCM 200mm Plasma Etch Details attached belowOEMモデルの説明
The UNITY® is a plasma etch system that delivers world-class process results on a wide range of applications, including HARC, Dual Damascene, low-k dielectrics, poly gate, and shallow trench etch. It is designed to achieve excellent cost performance for the 130nm design rule and future technology generations. The UNITY® has various platforms, including the IIe, M, and Me, each designed to achieve higher productivity and reliability for specific applications. The UNITY® M model features high throughput, a compact design, and lower CoO (Cost of Ownership), as well as ease of maintenance. The UNITY® Me model includes a Flow Control System. The UNITY® IIe is available in 84, 85, and 88 models and features PE (IIe), IEM (IIe), DRM, and SCCM™ chambers.ドキュメント
TEL / TOKYO ELECTRON
UNITY M
検証済み
カテゴリ
Plasma Etch
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
66653
ウェーハサイズ:
8"/200mm
ヴィンテージ:
1985
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示TEL / TOKYO ELECTRON
UNITY M
検証済み
カテゴリ
Plasma Etch
最終検証: 60日以上前
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
66653
ウェーハサイズ:
8"/200mm
ヴィンテージ:
1985
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available