Bpure series of tube/boat cleaning tools provides customized cleaning (immersion or spray) of critical diffusion furnace components. Applicable Parts: 300 mm Tubes and Boats Applicable Materials: Quartz, SiC Technology Markets: Analog IC, Digital IC, Power IC, MEMS, Advanced Packaging.

Akrion focuses on multiple wet process solutions for semiconductor applications where high yield and low cost of ownership is a challenge. Each process step in device manufacturing presents an opportunity for contamination, which can result in defect formation and device failure, therefore critical cleaning is an integral part of our equipment’s capabilities.

BPURE TC3000A

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