ACCURA XT
カテゴリ
Final Test概要（Overview）
The Accura XT is an advanced focused ion beam (FIB) mask repair system designed for repairing defects on today's most complex masks including MoSiON embedded phase shift, alternating phase shift, chrome binary, and optical proximity correction (OPC) feature masks. The Accura XT enables advanced masks to reach production more rapidly at reduced cost.
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