High sensitivity and high power!
Adopted a new platform (newly developed TMP / Valve block), high sensitivity and high response type with FINE mode as the standard. Even higher power type with 500L/min multi-stage roots pump.

CANON acquired ANELVA and became CANON ANELVA Corporation which focuses on: Vacuum thin-film deposition and processing equipment, semiconductor device manufacturing equipment, storage device manufacturing equipment, equipment for electronic device manufacturing and for R&D, maintenance service, and vacuum components.


M-222LD-D-H_500

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