説明
説明なし構成
• Inline left or right configuration available • Altitude: Varies by site • Lens Type: 4:1, 9M 4IL1 • Chamber Set Point Temperature: 22.2°C • Variable numerical aperture: 0.40-0.52 • Sigma Illuminator: 0.75 • 3.5kW Mercury ARC Lamp • Laser Step Alignment (LSA) • Phase Contrast Field Image Alignment (PCFIA) • AIS Focus Calibration • Active Vibration Isolation System • Reticle Size: 6 x 0.25 inches • Reticle Barcode Reader • Moveable Reticle Microscope • Pellicle Particle Detector (PPD3) • Wafer Loader with Type 3 Wafer Loader Controller • Ceramic Wafer Holder • Chip leveling (Multi-Point Focus/Level) • Extended wafer carrier table • Tool was used in a copper process line for polymide exposeOEMモデルの説明
The NIKON NSR SF100 is a Steppers and Scanners system. The NSR SF100 can be used with Wafer Size of 8”. The NSR SF100 design predicts the line configuration for 2001 and beyond, and responds with a high throughput of 80 plus wafers/hour on full-scale production lines using 300 mm wafers.ドキュメント
ドキュメントなし
NIKON
NSR-SF100
検証済み
カテゴリ
I-Line
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
23977
ウェーハサイズ：
12"/300mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示同様のリストが見つかりません
NIKON
NSR-SF100
検証済み
カテゴリ
I-Line
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
23977
ウェーハサイズ：
12"/300mm
ヴィンテージ：
不明
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
• Inline left or right configuration available • Altitude: Varies by site • Lens Type: 4:1, 9M 4IL1 • Chamber Set Point Temperature: 22.2°C • Variable numerical aperture: 0.40-0.52 • Sigma Illuminator: 0.75 • 3.5kW Mercury ARC Lamp • Laser Step Alignment (LSA) • Phase Contrast Field Image Alignment (PCFIA) • AIS Focus Calibration • Active Vibration Isolation System • Reticle Size: 6 x 0.25 inches • Reticle Barcode Reader • Moveable Reticle Microscope • Pellicle Particle Detector (PPD3) • Wafer Loader with Type 3 Wafer Loader Controller • Ceramic Wafer Holder • Chip leveling (Multi-Point Focus/Level) • Extended wafer carrier table • Tool was used in a copper process line for polymide exposeOEMモデルの説明
The NIKON NSR SF100 is a Steppers and Scanners system. The NSR SF100 can be used with Wafer Size of 8”. The NSR SF100 design predicts the line configuration for 2001 and beyond, and responds with a high throughput of 80 plus wafers/hour on full-scale production lines using 300 mm wafers.ドキュメント
ドキュメントなし
同様のリスト
すべて表示同様のリストが見つかりません