説明
High Current Implanter構成
Upgraded by Applied Materials in 2007 from model 9500 to XR200. Variable angle disk Direct Rotary Drive Batch Notch Aligner 3-position Beamstop Ceramic Blade Isolation Transformer SDS Gas box Assembly with 2XSDS and 2X high pressure gas panels Safety Retrofit Kit Source Cooling Source Isolation Transformer Plasma Flood Gun with remote sensor Heat sink configuration: shin-etsu inserts with bumps Ultra Life Source, converted from Bernas source in 2007 Enlarged Source Chamber with Liners Turbo Pump: 2 each Leybold turbo mech parts 8500 Cryo Pump: 2 each Includes: 3 backing Pumps, 2Cryo-Pumps, 1 Cryo Compressor ENERGY RANGE ACCELERATION DRIFT/ACCEL DIFFERENTIAL PRE-ANALYSIS POST ANALYSIS 2 kV to 200 kV 2 kV to 60 kV 0 to 160 kVOEMモデルの説明
The AMAT XR200 is a high current ion implanter that can be configured for nodes ranging from 125mm-200mm.ドキュメント
ドキュメントなし
APPLIED MATERIALS (AMAT)
xR200
検証済み
カテゴリ
Ion Implantation
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
104405
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
APPLIED MATERIALS (AMAT)
xR200
カテゴリ
Ion Implantation
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
104405
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
High Current Implanter構成
Upgraded by Applied Materials in 2007 from model 9500 to XR200. Variable angle disk Direct Rotary Drive Batch Notch Aligner 3-position Beamstop Ceramic Blade Isolation Transformer SDS Gas box Assembly with 2XSDS and 2X high pressure gas panels Safety Retrofit Kit Source Cooling Source Isolation Transformer Plasma Flood Gun with remote sensor Heat sink configuration: shin-etsu inserts with bumps Ultra Life Source, converted from Bernas source in 2007 Enlarged Source Chamber with Liners Turbo Pump: 2 each Leybold turbo mech parts 8500 Cryo Pump: 2 each Includes: 3 backing Pumps, 2Cryo-Pumps, 1 Cryo Compressor ENERGY RANGE ACCELERATION DRIFT/ACCEL DIFFERENTIAL PRE-ANALYSIS POST ANALYSIS 2 kV to 200 kV 2 kV to 60 kV 0 to 160 kVOEMモデルの説明
The AMAT XR200 is a high current ion implanter that can be configured for nodes ranging from 125mm-200mm.ドキュメント
ドキュメントなし