概要（Overview）

ATC-2020-IM equipped with a 14cm, gridded, RF ion source positioned for uniform milling of a 100mm Ø substrate. System features a 700 l/s turbopump, computer control, SIMS end point detection, and substrate holder with motorized tilting, rotation, and water cooling. ATC-2020-IM (Internal view) Features a 14cm, gridded, RF ion source with hollow cathode neutralizer, 6” substrate holder with motorized/programmable +/- 90° tilt angle control, azimuthal rotation, water cooling, and SIMS end point detection.