概要（Overview）

The Gatan 682 Precision Etching and Coating System (PECS) is a benchtop instrument designed for the preparation of samples for scanning electron microscopy (SEM) and other analytical techniques. It utilizes broad-beam argon ion milling to polish and etch sample surfaces, removing damage and revealing microstructural details. Additionally, the system can sputter-coat samples with conductive materials, such as gold-palladium (Au/Pd), platinum (Pt), chromium (Cr), and carbon (C), to enhance imaging quality and prevent charging during SEM analysis. The PECS allows for both etching and coating processes to be performed on the same sample without breaking vacuum, ensuring sample integrity and efficiency in preparation.