The microVEGA™xMR is the first industrial annealing system for selective integrated magnetic sensor formation. Incorporating a highly flexible tool configuration with on-the-fly spot and variable laser energy, the system can accommodate both Giant Magnetoresistance (GMR) and Tunnel Magnetoresistance (TMR) sensors, as well as easily adjust magnetic orientation, sensor position and sensor dimension—making it an ideal solution for magnetic sensor production.

3D-Micromac AG is the industry leader in laser micromachining. 3D-Micromac AG develop processes, machines and turnkey solutions at the highest technical and technological level. 

microVEGA xMR

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