説明
Cluster Tool Tracks (Resist Coater/Developer)構成
構成なしOEMモデルの説明
The Polaris 2000 Cluster is a next-generation system introduced by the Microlithography division of FSI near the close of fiscal 1994. The system boasts higher throughput and enhanced productivity, with a new high capacity feature that allows the robotic handler to move horizontally within the cluster and access more modules. The Polaris 2000 Cluster tool is positioned in both the high throughput manufacturing arena and the leading edge high-resolution technology area, making it attractive for customers who require “mix and match” capability in their manufacturing lines.ドキュメント
ドキュメントなし
TEL / FSI
POLARIS 2000
検証済み
カテゴリ
Lithography
最終検証： 24日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
113801
ウェーハサイズ：
6"/150mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
TEL / FSI
POLARIS 2000
カテゴリ
Lithography
最終検証： 24日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
113801
ウェーハサイズ：
6"/150mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Cluster Tool Tracks (Resist Coater/Developer)構成
構成なしOEMモデルの説明
The Polaris 2000 Cluster is a next-generation system introduced by the Microlithography division of FSI near the close of fiscal 1994. The system boasts higher throughput and enhanced productivity, with a new high capacity feature that allows the robotic handler to move horizontally within the cluster and access more modules. The Polaris 2000 Cluster tool is positioned in both the high throughput manufacturing arena and the leading edge high-resolution technology area, making it attractive for customers who require “mix and match” capability in their manufacturing lines.ドキュメント
ドキュメントなし