NANOFRAZOR EXPLORE
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Lithography概要(Overview)
NanoFrazor lithography systems are based on thermal scanning probe lithography. Core of the NanoFrazor technology is an ultra-sharp heatable probe tip which is used for writing and simultaneous inspection of complex nanostructures. The heated tip creates arbitrary, high-resolution nanostructures by local sublimation of resists. Standard pattern transfer methods like lift-off or etching can be applied.
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