c.VERTICOO 200
カテゴリ
LPCVD Poly概要（Overview）
The c.VERTICOO 200 is a high-volume furnace that features a unique single-tube setup. It integrates dual boat logistics and fully automated carrier-to-carrier wafer handling, ensuring maximum throughput. The system is capable of handling batch sizes of up to 150 wafers, making it an efficient solution for high-volume wafer processing.
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