The Therma-Wave TP-630 possesses state-of-the-art ion implant measurement technology for wafer sizes up to 300 millimeters. It has expanded wafer measurement capability to handle the new 300 millimeter silicon wafers, in addition to traditional 200 millimeter wafers.

KLA-Tencor Corporation announced it has completed its acquisition of Therma-Wave Corporation.
Therma-Wave develops, manufactures, and sells process control metrology systems used in the manufacture of semiconductors.

TP-630

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