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MA200CC
概要（Overview）
The SUSS MA 200CC tools are automatic production mask aligners for making MCM-D substrates. They deliver excellent printing results with photo-BCB, a dielectric material used in MCMs. These aligners are suitable for designs as small as 5 microns and meet future photolithography needs in MCM-D technology. Their large depth of focus enables patterning on uneven surfaces.
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