WAFERSIGHT
カテゴリ
Metrology概要（Overview）
A new wafer flatness and shape metrology tool for 300mm and advanced 200mm production, the WaferSight measurement precision allows wafer and device manufacturers to meet ITRS metrology requirements down to the 35nm generation. Utilizing optical technologies, the WaferSight system extends ADE’s market presence in wafer dimensional metrology.
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