概要（Overview）

The CAMECA ISM 6f-E7 is a secondary ion mass spectrometer (SIMS) used in the semiconductor industry for depth profiling of semiconductor devices. The ISM 6f-E7 ion source is designed to be compatible with CAMECA SIMS instruments, such as the CAMECA IMS 7f-Auto or the CAMECA NanoSIMS, offering seamless integration and optimized performance.