説明
CDE Resistivity RESPROBE The CDE Resmap 4 point resistivity mapper is used for measuring resistivity across the wafer for substrates and thin films deposited in the facility.構成
The resistivity range is 2mOhm/Square to 5MOhm/square. Contour plots, 3D plots, histograms, data exporting are supported from the Windows XP based control system. Type Table Top Wafer load Manual Wafer size 2” to 8” Mini Environment N/A Probe Changer N/A Aligner N/A Size 12” x 19” x 10” Range 1mΩ/☐ to 10MΩ/☐ Accuracy 0.5% Repeatability 0.02% static Repeatability 0.1% dynamicOEMモデルの説明
The CDE ResMap 178 is a precision instrument for measuring the sheet resistivity of a conductive media (metal and semiconductor applications). It is a table top model with manual wafer load and can measure wafer sizes from 2” to 8”. It has become an industry standard for cost effective resistivity measurement. The CDE ResMap 178 has an accuracy of 0.5% and a repeatability of 0.02% static and 0.1% dynamic. The CDE ResMap 178 has a resistivity range of 2mOhm/Square to 5MOhm/square. The CDE ResMap 178 has a maximum throughput of 1 minute per wafer (49 sites).ドキュメント
ドキュメントなし
CDE
ResMap 178
検証済み
カテゴリ
Metrology
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
46839
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
CDE
ResMap 178
検証済み
カテゴリ
Metrology
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
46839
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
CDE Resistivity RESPROBE The CDE Resmap 4 point resistivity mapper is used for measuring resistivity across the wafer for substrates and thin films deposited in the facility.構成
The resistivity range is 2mOhm/Square to 5MOhm/square. Contour plots, 3D plots, histograms, data exporting are supported from the Windows XP based control system. Type Table Top Wafer load Manual Wafer size 2” to 8” Mini Environment N/A Probe Changer N/A Aligner N/A Size 12” x 19” x 10” Range 1mΩ/☐ to 10MΩ/☐ Accuracy 0.5% Repeatability 0.02% static Repeatability 0.1% dynamicOEMモデルの説明
The CDE ResMap 178 is a precision instrument for measuring the sheet resistivity of a conductive media (metal and semiconductor applications). It is a table top model with manual wafer load and can measure wafer sizes from 2” to 8”. It has become an industry standard for cost effective resistivity measurement. The CDE ResMap 178 has an accuracy of 0.5% and a repeatability of 0.02% static and 0.1% dynamic. The CDE ResMap 178 has a resistivity range of 2mOhm/Square to 5MOhm/square. The CDE ResMap 178 has a maximum throughput of 1 minute per wafer (49 sites).ドキュメント
ドキュメントなし