The fully automated SUSS DSM200 also features a robotic substrate handling system. In addition, customized handling options are available, including unique measurement chucks. Optional IR illumination enables through-silicon measurement capability.

SUSS MicroTec offers a wide product portfolio of high quality process solutions for the semiconductor industry and related markets. SUSS portfolio covers a comprehensive range of products and solutions for backend lithography, wafer bonding, and photomask processing, complemented by micro-optical components. 

DSM200 Gen2

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