PKMRAM
カテゴリ
Metrology概要（Overview）
The MicroSense® PKMRAM system utilizes the polar Magneto-Optical Kerr Effect (MOKE) to characterize multi-layer wafers’ magnetic properties used to develop and manufacture perpendicular MRAM. Utilizing a non-contact full-wafer measurement technique, the system creates a map of the magnetic properties of entire wafers up to 300mm. The system is available in both manual loading or fully-automated configurations to meet R&D and/or production requirements.
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