Minimum 150 mm
 Maximum 200 mm
 Set Size 200 mm

KLA inhabits two worlds: one that’s nanometers in scale and one that’s global. This micro and macro view gives us a unique perspective. We see electrons wave and industries transform. When you put deep science together with optimism, big things happen.

Our process-control and process-enabling solutions are designed to boost the innovation speed of the electronics industry. We help our customers achieve leading-edge performance.

The OmniMap® RS75/tc is a resistivity mapping system designed to help semiconductor manufacturers perform accurate wafer characterization and critical production monitoring at substantially greater speeds. It addresses a wide variety of process applications where film thickness and sheet resistance are critical, such as ion implantation, metallization, diffusion, epitaxy and polysilicon. The RS75/tc model incorporates a patented temperature compensation (tc) solution, allowing the system to correct for temperature variations, dramatically affecting long-term repeatability, accuracy, and system-to-system matching. With measurement speed of approximately 1 second per test site, the tool can process a 25-slot cassette of 200mm wafers at over 100 wafers per hour. This includes five-site monitoring, with automatic temperature compensation and flat alignment. The RS75 series is offered in a variety of configurations to meet customer production requirements.

OmniMap RS75/tc

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KLA

OmniMap RS75/tc

Resistivity / Four Point Probe

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OmniMap RS75/tc

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OmniMap RS75/tc

OmniMap RS75/tc

Resistivity / Four Point Probe

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OmniMap RS75/tc

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OmniMap RS75/tc

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OmniMap RS75/tc

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OmniMap RS75/tc

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OmniMap RS75/tc