説明
Tencor / Prometrix RS 35 (RS35) 4PP *. Refurbished *. Installed in Clean-room構成
*. Process: wafer Sheet Resistance measurement *. Measurement perfomance: - 4 Point Probe check surface on Silicon wafer - Measurement range <5 mohm/sq to > 5 Megohm/sq - Routine check 1-30 sites programmable - Counter/ 3-D map, Diameter scan 49,81,121,225,361,441,625 sites - XY map up to 1200 sites programmable *. Measurement Specifications - Measurement repeatability <0.2% ( 1 Sigma) - Absolute accuracy based on NIST(NBS) standard wafers +-1% of NIST certified range *. Hardware configuration: - Radial Stage and Probe head Assembly - Electronics Card Cage ( CPU and I/O Chanel, Motor Controller, Display I/O, RS232 Part..) - Diagnostics Pannel - DC Power supply - Operator Console with keyboard *. Wafer Size: 2"~ 8" *. Software configuration: - Operation Software: StatTrax *. Utility & power - power requirements 115v 50/60hz - Required compressed Air 80 ~100 PSI , Vacuum : 25 mmHgOEMモデルの説明
提供なしドキュメント
ドキュメントなし
KLA
RS35
検証済み
カテゴリ
Metrology
最終検証： 30日以上前
主なアイテムの詳細
状態：
Refurbished
稼働ステータス:
不明
製品ID：
66001
ウェーハサイズ：
8"/200mm
ヴィンテージ：
1998
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
RS35
カテゴリ
Metrology
最終検証： 30日以上前
主なアイテムの詳細
状態：
Refurbished
稼働ステータス:
不明
製品ID：
66001
ウェーハサイズ：
8"/200mm
ヴィンテージ：
1998
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Tencor / Prometrix RS 35 (RS35) 4PP *. Refurbished *. Installed in Clean-room構成
*. Process: wafer Sheet Resistance measurement *. Measurement perfomance: - 4 Point Probe check surface on Silicon wafer - Measurement range <5 mohm/sq to > 5 Megohm/sq - Routine check 1-30 sites programmable - Counter/ 3-D map, Diameter scan 49,81,121,225,361,441,625 sites - XY map up to 1200 sites programmable *. Measurement Specifications - Measurement repeatability <0.2% ( 1 Sigma) - Absolute accuracy based on NIST(NBS) standard wafers +-1% of NIST certified range *. Hardware configuration: - Radial Stage and Probe head Assembly - Electronics Card Cage ( CPU and I/O Chanel, Motor Controller, Display I/O, RS232 Part..) - Diagnostics Pannel - DC Power supply - Operator Console with keyboard *. Wafer Size: 2"~ 8" *. Software configuration: - Operation Software: StatTrax *. Utility & power - power requirements 115v 50/60hz - Required compressed Air 80 ~100 PSI , Vacuum : 25 mmHgOEMモデルの説明
提供なしドキュメント
ドキュメントなし