概要（Overview）

The NovaScan 2040 and 3060 have an overall measurement time of 13 seconds per wafer for 13 sites, compatible with all high-throughput polishers, enabling measurement and mapping of all wafers both pre- and post-polish without affecting the polisher’s throughput. Nova is the only Integrated Metrology provider to offer both wet and dry integrations allowing customers to choose the best alternative. The NovaScan 2040/3060 utilizes UV Spectrophotometry to accurately measure and map the most advanced applications in the semiconductor industry down to the 0.09µm technology node.