概要（Overview）

The SEMILAB MCV-530 is a system designed for fast and reliable testing of dielectric and epitaxial layers using a mercury probe. It is ideal for research and development or small volume production. The MCV-530/530L systems are manual loading measurement equipment, but they have the same measurement capabilities as the automatic MCV-2200/2500 products. The MCV-530L can handle full wafers from 50 mm to 200 mm, while the MCV-530 can handle full wafers from 50 mm to 300 mm. Both systems can also handle coupon samples or fractions with a minimum sample size of 40 mm x 40 mm. Manual loading systems, however they have the same measurement abilities like the automatic MCV-2200/2500 product.