概要（Overview）

The PHEMOS-1000 is a high-res emission microscope for pinpointing semiconductor device failures by detecting weak light and heat emissions caused by defects. It seamlessly integrates with a general-purpose prober, leveraging familiar sample setups for versatile analysis. Optional laser scan system enables high-res pattern images. Multiple detectors cater to diverse analysis techniques. Different types of detectors are available for various analysis techniques such as emission analysis, thermal analysis, and IR-OBIRCH analysis. The PHEMOS-1000 supports a wide variety of tasks and applications ranging from prober socket boards to a large-size 300 mm wafer prober