説明
説明なし構成
Software Version CACE 3.5.0286 PLC 3.65+ SLC 2.01 Process AlInGaP MOCVD Epitaxy Wafer Config & Size 12 x 3" Metal Organic Sources TMIn x 3, TMGa x 2, TMAl x 1, Cp2Mg x 1, DIPTe x 1 Hydride Sources PH3 x 2, AsH3 x 1, 100 ppm SiH4 in Ar x 1 Concentration Monitors Epison2 x 3 for TMIn, Epison2 x 1 for DIPTe Chiller Baths 4 available for MO Sources Purifiers Entegris getter for H2 Filters ‐ Heating System RF Coil with Trumpf Huttinger RF Generator BIG 80/50 Glove Box MBraun Nitrogen Glovebox with controller Exhaust System Custom Built Exhaust System Process Pump Kashiyama SD90V3 DOR & Glove Box Pumps Adixen ACP ‐ 15G x 2 Spare Parts Potentially some available Aixtron 2600 G3 MOCVD Reactor Specifications 3” Abatement Custom Built Wet/Dry Burn Abatement System Reactor Chiller Affinity Recirculating Closed Loop Chiller Ceiling Quartz Ceiling with temperature control In‐Situ Pyrometry ‐ Gas Foil Rotation (GFR) Active Spare Channels Yes ‐ TBDOEMモデルの説明
提供なしドキュメント
ドキュメントなし
カテゴリ
MOCVD
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
125708
ウェーハサイズ：
3"/75mm
ヴィンテージ：
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
AIXTRON
AIX 2600 G3
カテゴリ
MOCVD
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
125708
ウェーハサイズ：
3"/75mm
ヴィンテージ：
2000
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
Software Version CACE 3.5.0286 PLC 3.65+ SLC 2.01 Process AlInGaP MOCVD Epitaxy Wafer Config & Size 12 x 3" Metal Organic Sources TMIn x 3, TMGa x 2, TMAl x 1, Cp2Mg x 1, DIPTe x 1 Hydride Sources PH3 x 2, AsH3 x 1, 100 ppm SiH4 in Ar x 1 Concentration Monitors Epison2 x 3 for TMIn, Epison2 x 1 for DIPTe Chiller Baths 4 available for MO Sources Purifiers Entegris getter for H2 Filters ‐ Heating System RF Coil with Trumpf Huttinger RF Generator BIG 80/50 Glove Box MBraun Nitrogen Glovebox with controller Exhaust System Custom Built Exhaust System Process Pump Kashiyama SD90V3 DOR & Glove Box Pumps Adixen ACP ‐ 15G x 2 Spare Parts Potentially some available Aixtron 2600 G3 MOCVD Reactor Specifications 3” Abatement Custom Built Wet/Dry Burn Abatement System Reactor Chiller Affinity Recirculating Closed Loop Chiller Ceiling Quartz Ceiling with temperature control In‐Situ Pyrometry ‐ Gas Foil Rotation (GFR) Active Spare Channels Yes ‐ TBDOEMモデルの説明
提供なしドキュメント
ドキュメントなし