AIX R6
カテゴリ
MOCVD概要(Overview)
The AIXTRON AIX R6 is a Metal Organic Chemical Vapor Deposition (MOCVD) system specifically designed for producing LEDs based on Gallium Nitride (GaN). This advanced system offers the capability to accommodate different wafer configurations, with options available in 12x6-inch, 31x4-inch, and 121x2-inch setups. Its precise and controlled growth process enables the epitaxial growth of high-quality Gallium Nitride layers, making it a crucial tool for efficient and reliable LED production for various lighting and display applications.
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