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市場 > MOCVD > LAM RESEARCH / NOVELLUS > CONCEPT TWO "C2"

CONCEPT TWO "C2"

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MOCVD
概要(Overview)

The NOVELLUS CONCEPT TWO is a modular, integrated production system that is capable of depositing both dielectric and conductive metal layers by combining one or more processing chambers around a common, automated robotic wafer handler. It was introduced in November 1991.

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