概要（Overview）

The YieldStar 350E’s capabilities stem from key innovations such as a new, dedicated sensor for overlay measurements. In addition, improvements to how the light used in the diffraction-based measurements is both delivered and collected allows the new system to carry out multiple measurements at the same time. By increasing the number of sampling points, the YieldStar 350E actually helps reduce the amount manufacturers need to invest in metrology to deliver high yields.