概要（Overview）

The IVS 165 is a white light optical CD and overlay metrology system for semiconductor and MEMS applications. It boasts an industry-leading Mean Time Between Failure (MTBF) of 1800 hours, with modest maintenance requirements. The system is designed for optimal availability and years of problem-free operation, with versatile wafer handling and robust navigation. It delivers unparalleled measurement performance on all layers, with specific algorithms for MEMS applications. The IVS 165 sets itself apart with its high precision and rock-solid reliability.