メインコンテンツにスキップ
Moov logo

Moov Icon
市場 > PECVD > LAM RESEARCH / NOVELLUS > VECTOR EXTREME

VECTOR EXTREME

カテゴリ
PECVD
概要(Overview)

The Novellus VECTOR Extreme is an advanced 300mm Plasma-Enhanced Chemical Vapor Deposition (PECVD) system designed for memory fabs requiring exceptional throughput. It processes up to 250 wafers-per-hour and features a central wafer process chamber with a dual handling robot, allowing integration of up to three PECVD process modules on a single system. Utilizing Novellus' multi-station sequential processing (MSSP) architecture, the VECTOR Extreme's process modules remain hardware-transparent with VECTOR Express, ensuring easy process integration across platforms. Additionally, the VECTOR Extreme offers an ashable hard mask configuration, known as VECTOR Extreme AHM, catering to specific processing needs.

現在の掲載品

2

サービス

検査、保証、鑑定、ロジスティクス

トップ掲載リスト

このような製品をお持ちですか?
Moovに掲載品して、すぐに申し分ない購入者を見つけましょう。