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市場 > PECVD > LAM RESEARCH / NOVELLUS > VECTOR EXTREME

VECTOR EXTREME

カテゴリ
PECVD
概要(Overview)

The Novellus VECTOR Extreme is an advanced 300mm Plasma-Enhanced Chemical Vapor Deposition (PECVD) system designed for memory fabs requiring exceptional throughput. It processes up to 250 wafers-per-hour and features a central wafer process chamber with a dual handling robot, allowing integration of up to three PECVD process modules on a single system. Utilizing Novellus' multi-station sequential processing (MSSP) architecture, the VECTOR Extreme's process modules remain hardware-transparent with VECTOR Express, ensuring easy process integration across platforms. Additionally, the VECTOR Extreme offers an ashable hard mask configuration, known as VECTOR Extreme AHM, catering to specific processing needs.

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