説明
CVD, CU構成
2x FOUP Loadports Mini-Environment (Front End) Atmospheric Robot User Interface: screen & computer Light Tower 2x Loadlocks 2x Loadlock Cooling Pedestals 2x Linear Transfer Modules 4x Showerheads (subject to availability) Al Heater Pedestals with lift pins (station 1) Al Heater Pedestals (stations 2-4) Pneumatic Spindle Integrated Liquid Delivery System (not on this particular configuration) Low Frequency RF Generator High Frequency RF Generator RF Match Endpoint Controller Gas Box Local Power Box 3x Super Input / Output Controller (SIOC or HDSIOC – depends on age of tool) Motion Controller Module Controller Ceramic Carrier Rings (subject to availability) Non-F47 or F47 Configuration (depends on age of tool) Additional details available upon requestOEMモデルの説明
VECTOR is a PECVD system for dielectric films that radically transforms the playing field in terms of capital productivity. A 200mm/300mm bridge tool, VECTOR is designed to deliver a fully integrated low-k dielectric structure at 0.10 micron and smaller design rules. VECTOR is designed for high reliability, with 40% fewer critical subassemblies than the nearest competitor. With approximately 2/3rds the footprint of the nearest competitor, and a throughput of 120 wafers per hour.ドキュメント
LAM RESEARCH / NOVELLUS
VECTOR
検証済み
カテゴリ
PECVD
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
101692
ウェーハサイズ：
12"/300mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
LAM RESEARCH / NOVELLUS
VECTOR
カテゴリ
PECVD
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
101692
ウェーハサイズ：
12"/300mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available