CONCEPT THREE "C3" SPEED
カテゴリ
PECVD概要(Overview)
The Novellus Concept Three Speed is an advanced system designed for 300 mm wafers, boasting a proprietary hemispherical ion source and bi-polar electrostatic chuck. These innovative features ensure superior ion uniformity and precise temperature control. Even as the elements are scaled up for 300 mm wafers, the ion uniformity remains consistent due to the inherent design characteristics of the ion source. Additionally, an optimized gas delivery system enhances the overall within-wafer uniformity, further improving the system's performance.
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検査、保証、鑑定、ロジスティクス
トップ掲載リスト
LAM RESEARCH / NOVELLUS
CONCEPT THREE "C3" SPEED
PECVDヴィンテージ: 状態: 中古最終確認7日前LAM RESEARCH / NOVELLUS
CONCEPT THREE "C3" SPEED
PECVDヴィンテージ: 状態: 中古最終確認60日以上前LAM RESEARCH / NOVELLUS
CONCEPT THREE "C3" SPEED
PECVDヴィンテージ: 状態: 部品ツール最終確認60日以上前LAM RESEARCH / NOVELLUS
CONCEPT THREE "C3" SPEED
PECVDヴィンテージ: 状態: 中古最終確認60日以上前