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説明
This tool is powered off and de-installed.構成
Reticle : 5 inchOEMモデルの説明
FPA-2500i3 i-line stepper, 0.6 NA, 20mm x 20mm field, 44 wafers per hour, targeted at 64Mb DRAM Numerical Aperture: 0.60 / 0.52 Image Field: 20 mm [(X)11.14mm x (Y)26mm) Printing Wavelength: i-line (365 nm) Resolution:0.40μm Illumination Lamp: 1.5 kW super-high-pressure mercury lamp Illumination Uniformity: < ±1.2 % Current Wafer Size: 6”(4”, 5” and 8” Sizes Available) Magnification: X 1/5ドキュメント
ドキュメントなし
CANON
FPA-2500i3
検証済み
カテゴリ
Steppers & Scanners
最終検証: 27日前
主なアイテムの詳細
状態:
Used
稼働ステータス:
Deinstalled
製品ID:
103997
ウェーハサイズ:
6"/150mm
ヴィンテージ:
1994
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示CANON
FPA-2500i3
カテゴリ
Steppers & Scanners
最終検証: 27日前
主なアイテムの詳細
状態:
Used
稼働ステータス:
Deinstalled
製品ID:
103997
ウェーハサイズ:
6"/150mm
ヴィンテージ:
1994
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
This tool is powered off and de-installed.構成
Reticle : 5 inchOEMモデルの説明
FPA-2500i3 i-line stepper, 0.6 NA, 20mm x 20mm field, 44 wafers per hour, targeted at 64Mb DRAM Numerical Aperture: 0.60 / 0.52 Image Field: 20 mm [(X)11.14mm x (Y)26mm) Printing Wavelength: i-line (365 nm) Resolution:0.40μm Illumination Lamp: 1.5 kW super-high-pressure mercury lamp Illumination Uniformity: < ±1.2 % Current Wafer Size: 6”(4”, 5” and 8” Sizes Available) Magnification: X 1/5ドキュメント
ドキュメントなし