The RPMBlue™ is a photoluminescence (PL) mapping system designed specifically for the HB-LED market. It is used to measure the properties of epitaxial layers in HB-LEDs. The system is designed to provide accurate, precise, and reliable PL spectral metrology across the entire wavelength range. This includes high-Al content AlGaN alloys for GaN FET’s and UV lasers/LED’s to communication laser applications in the NIR and everything in between. The RPMBlue™ is the industry standard high-volume, production-oriented photoluminescence mapping system. By tuning the system capabilities to your control and measurement needs for the production line, the system becomes fast and economical.

ONTO / NANOMETRICS / ACCENT / BIO-RAD

RPMBlue

Epilayer uniformity defects and contamination, with automated wafer handling.

RPM SIGMA

EPIPLUS / ETAMAX

PLATO 

The RPM2000 is a Photoluminescence (PL) Mapping Tool designed specifically for the Compound Semiconductor market. It can handle substrate sizes of 75mm, 125mm, and 150mm and is used for detecting substrate defects and composition. Photoluminescence is a well-established, non-contact, non-destructive technique used in the development and process control of semiconductors. Room temperature PL wafer maps provide vital information on the uniformity of alloy composition, material quality, and defects in substrates, epilayers, and device structures. The RPM2000 has been designed to obtain whole wafer PL maps in a fraction of the time previously associated with this sort of measurement, giving the ability to measure and assess wafers between production runs. The primary benefit is that rapid feedback and remedial action can be implemented should wafer parameters be out of specification, avoiding wasted production runs thus saving time and costs. In addition, the speed of measurement also makes the incoming inspection and qualification of bought-in wafers a quick and easy task.

Photoluminescence Mapper

概要（Overview）

サービス

Photoluminescence Mapper のメーカー

Photoluminescence Mapper のトップ製品

RPMBlue

RPM SIGMA

PLATO

RPM2000