説明
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Config attached. PC Functional but fans will need to be changed Obsolescence power supply Communication problem following power supply retrofit -15V==> Switch CB18 OFF and ON after logging LAM ==> Communication Ok .OEMモデルの説明
The Rainbow 4520XL is part of Lam Research’s Rainbow series of etch systems. This series addresses processes for wafers up to 200mm and feature sizes as small as 0.35 micron. The Rainbow product line includes the 4400, 4500, 4600, and 4700 series for etching polysilicon, oxide, aluminum, and tungsten films. These systems offer improved etch capability, reliability, and performance through unique features such as a patented wafer handling system and a proprietary source for generating stable plasma.ドキュメント
LAM RESEARCH CORPORATION
RAINBOW 4520XL
検証済み
カテゴリ
Plasma Etch
主なアイテムの詳細
状態:
Used
稼働ステータス:
Installed / Idle
製品ID:
98809
ウェーハサイズ:
8"/200mm
ヴィンテージ:
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示LAM RESEARCH CORPORATION
RAINBOW 4520XL
検証済み
カテゴリ
Plasma Etch
最終検証: 今日
主なアイテムの詳細
状態:
Used
稼働ステータス:
Installed / Idle
製品ID:
98809
ウェーハサイズ:
8"/200mm
ヴィンテージ:
不明
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available