Plasma System

Inline processing of microelectronic devices held in boats, trays or other carriers. The advanced three-axis symmetrical plasma chamber treats all positions of a product uniformly, while maintaining tight control over process parameters for repeatable results.



Nordson MARCH was formed through the merging of March Instruments of Concord, California, USA and Advanced Plasma Systems (APS) of St. Petersburg, Florida, USA. The company was acquired in 1999 by Nordson Corporation and referred to as March Plasma Systems until renamed Nordson MARCH in 2009.

https://www.nordson.com/en/divisions/march

FlexTRAK-2MB

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