The EP-5800 RHO is a Wafer Edge Grinding Machine that is designed to be applicable to both operation flat and notch wafers. It has a minimum footprint among the machines with robotic transporter, making it a space-efficient choice for your wafer grinding needs.

Semiconductor manufacturing equipment: Probing machines, Dicing machines, Precision Blade, Polish grinders, Chemical mechanical planarizers (CMPs), Wafer slicing machines*, Wafer edge grinding machines*
Measuring instruments: Coordinate measuring machines, Surface texture and contour measuring instruments, Roundness and cylindrical profile measuring instruments, Optical measuring instrument, Machine control gauges*, Various types of sensors*



EP-5800 RHO

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