概要（Overview）

It has a newly developed XY stage drive unit and a new calculation procedure for a very high throughput. It also has an improved Z-platform for the highest probe power, which allows for even contact on high pin count probe cards with large surfaces. Additionally, it has a highly stable Z-axis with a large surface spindle cleaning unit and a 15 inch LCD touch screen for easy operation. The Optical Target Scope (OTS) allows for very precise measurements of the relative positions of Probe Cards and Chucks. The UF3000EX-HS is designed for high-speed testing and offers advanced features to enhance productivity and accuracy.