概要（Overview）

The CMT-SR5000 is a high precision system equipped to measure the Sheet Resistance and Resistivity of Silicon Wafer and Solar cell. This system is designed for easy operation by a personal computer with exclusive software, and this software has function for various data analyses mapping and etc. For 300mm/450mm wafer. Outside dimension: 300mm system : 580mm(W) × 700mm(D) × 430mm(H), 450mm system : 610mm(W) × 770mm(D) × 430mm(H).