概要（Overview）

The EG4/200: Introduced in 1999, the EG4/200 is targeted at high-end probing applications for 200mm wafers. The EG4/200 utilizes a unique "probe-centered z-drive" to provide very low deflections even under extremely high probe forces. This is important when testing multi-site or high pin count devices. The EG4/200 retains many of the features of the Horizon 4090 series probers such as linear motor and air-bearing positioning system. The EG4/200 uses a new version of the Company's EGCommander system software, which runs under the Windows-NT operating system.