概要（Overview）

The SUSS PM5 is the most cost-effective and simple, yet highly precise, probing solution for wafers and substrates up to 150 mm. Great application flexibility is ensured for DC and HF measurements, device and wafer characterization tests (DWC), failure analysis (FA), submicron probing, MEMS and opto engineering tests. It can also be used as a flexible probe card for special wafer level reliability (WLR) applications, allowing up to 20 SUSS ProbeHeadsTM at one time to be placed on the stable platen.