概要（Overview）

The cyberSCAN VANTAGE is a laser based non-contact inspection system. It combines high resolution sensor technology with x- and y-translation stages for surface scanning. The system can measure large areas up to 200mm with maximum x-, y-, z-resolution. All electronic components are integrated into a robust cast metal housing, no cables or external controllers are required. The proprietary and user friendly cyberTECHNOLOGIES Software offers sophisticated surface metrology analyses and automated measurement routines.