概要（Overview）

The cyberSCAN VANTAGE 50 is a compact, non-contact profiling system for fast scanning of any part or surface. The system combines a laser sensor, a base unit with an integrated translation stage and a PC or a laptop for data analysis. The sensor scans over the sample and produces a high-resolution height profile. The confocal laser sensor can also produce a scan line with the width of 1.1 mm and a lateral resolution of 2 μm. In combination with the translation stage a highly accurate 3D raster can be recorded. The software offers sophisticated surface metrology analyses and automated measurement routines.