概要（Overview）

The PLu neox is the most advanced optical profiler from Sensofar. Based on the successful series of PLu optical surface profilers, the PLu neox covers the broadest range of applications on 3D and thin film metrology due to the combination of confocal scanning, phase shift interferometry, vertical scanning interferometry and spectroscopic reflectometry. This powerful combination allows for fast 2D and 3D analysis of technical surfaces with less than 0.1 nm vertical resolution, the capability to measure steep slopes over 70 degrees on smooth surfaces, and thin film metrology with less than 1 nm of resolution.