The Veeco DEKTAK 3030 is a surface profile measuring system designed for measuring the surface profiles of surfaces such as wafers and microelectronic devices. It is capable of measuring surface profiles with a resolution of 0.1 nanometers and a vertical accuracy of 0.25 nanometers. It is also capable of measuring high aspect ratios and precision features. The system uses a stylus-based probe to measure the surface profile, with a stylus force of 0.5 to 5.0 milliNewtons. The system can also be used for measuring surface flatness, surface roughness, and other surface parameters.

VEECO

DEKTAK 3030

CONTOUR GT-K

DEKTAK 200 SI

V220SI	

DEKTAK OPS-1100

DEKTAK I

UVX310

Dimension Vx 210

DUVX-210

he Dektak 3 Surface Profilometer is an instrument to measure the vertical profile of samples, thin film thickness, and other topographical features, such as film roughness or wafer bowing.
A diamond stylus is moved vertically into in contact with the sample and then moved laterally across the sample for a specified distance and specified contact force. The instrument can measure small surface variations in vertical stylus displacement as a function of position. The Dektak profilometer can measure small vertical features ranging in height from 100 Å to 650,000 Å on a 5″ Diameter Sample Stage.

DEKTAK 3

VEECO

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トップVEECO Profiler

DEKTAK 3030

V220SI

CONTOUR GT-K

DEKTAK 200 SI

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すべてのVEECO Profiler