概要（Overview）

The Dektak® 150 is a surface profiler that is capable of measuring both thin and thick film step heights. It can measure steps below 100Å and can accommodate samples up to six inches in dimension and up to four inches thick. The Dektak 150 is also capable of profiling surface topography and waviness, as well as measuring surface roughness in the nanometer range. With a step-height repeatability of 0.6 nm (6Å), the Dektak 150 is a reliable tool for precise surface measurements.