概要（Overview）

The On-Board® cryogenic vacuum pumps feature embedded microprocessor control, enhancing performance, diagnostics, and communication. Paired with intuitive software and user interfaces, these pumps set the global standard for reliability and performance. Designed for critical vacuum processes, the On-Board Cryopump ensures optimal yields and throughput, available in diverse sizes to suit various applications. Key features include ultra-fast regenerations, advanced control systems, oil-free high vacuum pumping, low gas partial pressures, swift pumping speeds for reduced downtime, and suitability for Ion Implantation, PVD, and Sputtering.