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6" Fab For Sale from Moov - Click Here to Learn More
6" Fab For Sale from Moov - Click Here to Learn More
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6" Fab For Sale from Moov - Click Here to Learn More
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INTEGRITY

カテゴリ
CVD
概要(Overview)

Integrity is a low pressure (LP) CVD system for depositing advanced interlevel dielectric films. This system utilizes a patented integrated process design for flowing gases rapidly over the wafer, forming films that are highly uniform and planar to provide improved electrical performance. Integrity has been installed at several customer sites and is currently being used for production of semiconductor devices and in device development programs.

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