概要（Overview）

ATC 2200-H Horizontal Sputter Coater. Capable of coating concave, 25 mm thick, X-ray mirror substrates up to 300 mm in diameter with +/- 2% uniformity utilizing (4) in-situ tilt sputter guns. The substrate carrier can also be replaced by planetary tooling for a batch of 3D objects or small wafers or coupons.